Energy distributions of atoms sputtered from alkali halides by 540 eV electrons
摘要:
The emission of halogen and alkali atoms, occurring under bombardment of alkali halides with electrons has been investigated. The electron energy was 540 eV and the temperature of the target was varied between room temperature and 400°C. We measured the energy distribution of the emitted neutral particles with a time of flight method. It was found that either diffusing interstitial halogen atoms or moving holes dominate the sputtering process above 200°C. Below 150°C alkali halides with lattice parameter s/d 0.33 show emission of non-thermal halogen atoms. s is the interionic space between two halogen ions in a <110> direction and d is the diameter of a halogen atom. In general the energy distribution of the alkali and halogen atoms is thermal above 200°C, but not Maxwellian.
展开
关键词:
Experimental/ alkali metal halides electron impact sputtering time of flight spectra/ alkali halides 540 eV electrons energy distribution time of flight method sputtering process halogen emission alkali atom emission/ A7920K Other electron-surface impact phenomena
DOI:
10.1080/00337577808233172
被引量:
年份:
1978
相似文献
参考文献
引证文献
辅助模式
引用
文献可以批量引用啦~
欢迎点我试用!