Method and apparatus for correcting conversion coefficient of stripe gauging device and stripe gauging device

阅读量:

10

公开/公告日期:

Oct 4, 2006

发明人:

葛宗涛

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摘要:

本发明提供一种条纹计测装置的变换系数校正方法和装置以及具备该变换系数校正装置的条纹计测装置. The present invention provides a measuring device fringe transform coefficient correction method and apparatus and the measuring device includes a stripe transform coefficient correcting means. 能够将在条纹计测装置中设定的用于从计测空间的坐标系变换至实空间的坐标系的变换系数的值,容易且短时间内进行校正. The value of the transform coefficients can be set in fringe measurement from the means for converting the coordinate system of the measurement space to real space coordinate system, easily and corrected in a short time. 将具有以相互形成的角度成为基准值的方式构成的两个反射面(31,32)的校正用夹具(3)进行设置,利用条纹计测装置拍摄担载有2个反射面(31,32)的每个的倾斜度信息的一个条纹图像. Having two reflecting surfaces formed at an angle to each other as a reference value, which is composed of (31, 32) of the calibration jig (3) are set up, using the fringe measuring device carries a two shot reflecting surface (31, 32 ) a fringe image for each inclination information. 基于该一个条纹图像,求出在计测空间坐标系中的2个反射面(31,32)形成的角度的计算值,按照该计算值在规定的单位系下与基准值一致的方式校正变换系数的值. A fringe image based on the obtained coordinates in the measurement space in the two reflecting surfaces (31, 32) forming an angle of calculated values, in accordance with the calculated value in a predetermined unit-based manner consistent with the reference value correction conversion values of the coefficients.

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