OXIDE SINTERED BODY, TARGET, TRANSPARENT CONDUCTIVE FILM OBTAINED BY USING THE SAME, AND TRANSPARENT CONDUCTIVE SUBSTRATE
申请(专利)号:
JP20130026303
申请日期:
2013-02-14
公开/公告号:
JP2013126944A
公开/公告日期:
2013-06-27
申请(专利权)人:
SUMITOMO METAL MINING CO LTD
摘要:
PROBLEM TO BE SOLVED: To provide an oxide sintered body having zinc oxide as a main component, and still more containing magnesium, a target obtained by processing the same, a transparent conductive film having excellent chemical resistance and low resistance, obtained by a direct-current sputtering method or an ion plating method by using the same, and to provided a transparent conductive substrate.
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