Optical device, optical communication device and manufacturing method of optical device
申请(专利)号:
JP20200195308
申请日期:
2020-11-25
公开/公告号:
JP2022083779A
公开/公告日期:
2022-06-06
申请(专利权)人:
富士通オプティカルコンポーネンツ株式会社
摘要:
Problem to be solved: to provide an optical device capable of suppressing deterioration in the modulation band, an optical communication apparatus, and a method of manufacturing an optical device.The optical device has a Si substrate, a ground electrode, an LN optical waveguide, and a signal electrode.The ground electrode is a ground potential electrode stacked on the Si substrate.An LN optical waveguide is an optical waveguide formed by a thin film ln substrate laminated on a ground electrode.The signal electrode is disposed at a position opposed to the ground electrode with an LN optical waveguide interposed therebetween, and is an electrode for applying a high-frequency signal.Diagram
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