Method for patterning electroless plated metal on a polymer substrate
申请(专利)号:
US07/600361
申请日期:
19901019
公开/公告号:
US05084299A
公开/公告日期:
19920128
申请(专利权)人:
MICROELECTRONICS AND COMPUTER TECHNOLOGY CORPORATION
被引量:
摘要:
A method for patterning electroless plated metal on a polymer substrate. In a first embodiment a substrate is first coated with a polymer suitable for complexing a seed metal which can initiate electroless plating. The polymer is then mixed with a seed metal such as palladium, selectively irradiated to form the desired conductor pattern, and then etched so that the desired pattern remains. The substrate is subsequently placed in an electroless plating bath to form a metal pattern. In a second embodiment, before applying the seed metal a substrate immersed in a polymer solution suitable for complexing a seed metal can be selectively irradiated to selectively deposit polymer on the substrate, followed by applying a seed metal to form a polymer-seed metal mixture and an electroless plating bath. In addition, an alkaline chemical may be added to an acidic polymer to prevent the polymer from etching metal on the substrate.
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