(Meth)acrylate derivative, intermediate thereof, and polymer compound
摘要：
Provided are a polymerizable compound shown below which is useful as a raw material for a polymer having less swelling in developing, a polymer obtained by polymerizing a raw material containing the above polymerizable compound, a photoresist composition which contains the above polymer and which is improved in LWR and an efficient production process for the polymerizable compound described above
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DOI：
US8492562 B2
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2011
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