摘要：

Surface acoustic wave atomization is also effective for generating microparticles and nanoparticles , because of the small wavelength with the high frequency. In this work, a novel directional surface acoustic wave (SAW) atomizer via a novel 9.6 MHz unidirectional interdigital transducer (U-IDT), a driving interdigital transducer (D-IDT) and a reflector interdigital transducer (R-IDT), is proposed and studied for the 1-micron spray system, such as the pulmonary drug delivery system and high-precision film deposition system . The atomization characteristics of a water drop are evaluated with atomized droplet size , atomizing particle velocity , and atomizing rate. Around 1 m atomized droplet diameter, 585 mm/s atomizing particle velocity, and 4.2 ml/min atomizing rate are achieved and investigated. Based on the 1-micron atomized droplet diameter and high diffusion velocity, a novel pulmonary drug delivery system with the SAW spray can be excepted as an effective non-intrusive treatment method. It is also suitable for microparticle and nanoparticle spray without the pump and fan systems in the fields of industry, cosmetics, medicine, and medical devices.

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