METAL/CERAMIC BONDED BODY, DIAPHRAGM VACUUM GAUGE, BONDING METHOD FOR METAL AND CERAMIC, AND PRODUCTION METHOD FOR DIAPHRAGM VACUUM GAUGE
申请(专利)号:
US201515109612
申请日期:
2015-01-08
公开/公告号:
US2016349135A1
公开/公告日期:
2016-12-01
申请(专利权)人:
ULVAC, INC.
国省代号:
JP
摘要:
A metal-ceramic bonded body includes a metal member, a ceramic member, a bonding layer that is formed from a glaze and bonds the metal member and the ceramic member. A conductive layer defines an outer surface of the ceramic member and is covered by the bonding layer. The conductive layer has a higher electrical conductivity than the bonding layer. A terminal layer is located on a portion of the outer surface of the ceramic member that is separated from the metal member. The bonding layer is located between the metal member and the terminal layer. The conductive layer includes a conductive metallized layer in which metal particles are diffused in the outer surface of the ceramic member, and a conductive metal layer that covers at least a portion of the conductive metallized layer.
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