Design of Functional Microstructures for Flexible Sensors Towards Wearable Applications

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2

作者:

Q Zhou

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摘要:

Flexible and wearable sensors are gaining continuous enthusiasm and extensively studied for potential applications in human-machine interface, soft robotics, electronic skin, and healthcare monitors. In order to meet the industrial requirement and practical needs of human, continuous efforts should be performed to pave the way to realize the wearable sensors towards high sensor performance and simple processing in affordable manner. This dissertation describes our investigations in the structural design and functionalization of the flexible sensors towards high sensor performance, cost effective fabrication, multi-functions, targeted wearable and intelligent applications.To begin with, for the high-performance and cost-effective flexible pressure sensor, we prepared a highly sensitive (124 kPa-1 , 0-200 Pa) resistive pressure sensor based on a tunable and lithograph-free spraying method. To improve the detection range, we then fabricated a highly sensitive, wide detection range (up to 200 kPa) capacitive pressure sensor based on hair-like micro-cilia array (MCA) via one-step, adjustable and magnetic-field-assisted fabrication method.Furthermore, for high-performance dual-mode flexible sensor, we designed magnetic tilted micropillar array (MTMPA) via a facile and tunable methodology to obtain a flexible dual-mode capacitive tactile/touchless sensor. The MTMPA sandwiched in AgNW/PDMS electrodes can response to the external pressure and magnetic field with bidirectional deflection, allowing the sensor to precisely distinguish different stimuli in real-time without overlapping. As a proof of concept, practical wearable tactile applications and touchless demonstrations have been presented.Finally, for wearable intelligent sensors, we designed a hair-like tilted flexible micromagnet array (t-FMA) to obtain a highly sensitive flexible capacitive sensor of magnetic field for high-efficient, programmable information transmission. With the bi-directional bending capability of t-FMA actuated by magnetic torque, the sensor can recognize both the magnitude and orientation of magnetic field in real time with non-overlapping capacitance signals. The optimized sensor exhibits the high sensitivity of over 1.3 T-1 and detection limit down to 1 mT with excellent durability. As proof of the concept, the sensor has been successfully demonstrated for convenient, efficient, and programmable interaction systems, as well as high-capacity transmitter for cryptic information interaction and multi-control instruction outputting, using magnetic field information as high-capacity information carrier.

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学位级别:

Ph.D.

学位年度:

2021

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来源学校

University of Macau.;University of Macau.;University of Macau.

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