Oxide sintered body, target, transparent conductive film obtained using the same, and transparent conductive substrate
申请(专利)号:
JP20080520471
申请日期:
2007-05-11
公开/公告号:
JP5593612B2
公开/公告日期:
2014-09-24
申请(专利权)人:
住友金属鉱山株式会社
摘要:
Provided are an oxide sintered body having zinc oxide as a main component and still more containing magnesium, a target obtained by processing the same, a transparent conductive film having excellent chemical resistance and low resistance, obtained by a direct-current sputtering method or an ion plating method by using the same, and a transparent conductive substrate. Provided are an oxide sintered body having zinc oxide and magnesium, wherein the content of magnesium is from 0.02 to 0.30 as atom number ratio of Mg/(Zn+Mg); still more, an oxide sintered body having zinc oxide, magnesium, gallium and/or aluminum, wherein the content of gallium and/or aluminum is over 0 and equal to or lower than 0.09 as atom number ratio of (Ga+A1)/(Zn+Ga+Al), and the content of magnesium is from 0.02 to 0.30 as atom number ratio of Mg/(Zn+ Ga+Al+Mg); a target obtained by processing these oxide sintered bodies; and a transparent conductive film formed on a substrate by a sputtering method or an ion plating method, by using this target.
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