Oxide sintered body, target, transparent conductive film obtained using the same, and transparent conductive substrate

阅读量:

16

申请(专利)号:

JP20080520471

申请日期:

2007-05-11

公开/公告号:

JP5593612B2

公开/公告日期:

2014-09-24

申请(专利权)人:

住友金属鉱山株式会社

发明人:

中山 徳行阿部 能之

展开

摘要:

Provided are an oxide sintered body having zinc oxide as a main component and still more containing magnesium, a target obtained by processing the same, a transparent conductive film having excellent chemical resistance and low resistance, obtained by a direct-current sputtering method or an ion plating method by using the same, and a transparent conductive substrate. Provided are an oxide sintered body having zinc oxide and magnesium, wherein the content of magnesium is from 0.02 to 0.30 as atom number ratio of Mg/(Zn+Mg); still more, an oxide sintered body having zinc oxide, magnesium, gallium and/or aluminum, wherein the content of gallium and/or aluminum is over 0 and equal to or lower than 0.09 as atom number ratio of (Ga+A1)/(Zn+Ga+Al), and the content of magnesium is from 0.02 to 0.30 as atom number ratio of Mg/(Zn+ Ga+Al+Mg); a target obtained by processing these oxide sintered bodies; and a transparent conductive film formed on a substrate by a sputtering method or an ion plating method, by using this target.

展开

通过文献互助平台发起求助,成功后即可免费获取论文全文。

相似文献

参考文献

引证文献

辅助模式

0

引用

文献可以批量引用啦~
欢迎点我试用!

关于我们

百度学术集成海量学术资源,融合人工智能、深度学习、大数据分析等技术,为科研工作者提供全面快捷的学术服务。在这里我们保持学习的态度,不忘初心,砥砺前行。
了解更多>>

友情链接

百度云百度翻译

联系我们

合作与服务

期刊合作 图书馆合作 下载产品手册

©2025 Baidu 百度学术声明 使用百度前必读

引用