Process and apparatus for formation of photovoltaic compounds

阅读量:

12

申请(专利)号:

US19830543548

申请日期:

1983-10-19

公开/公告号:

US4526809A

公开/公告日期:

1985-07-02

申请(专利权)人:

UNIVERSITY OF DELAWARE

发明人:

Robert B. HallRichard E. Rocheleau

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被引量:

16

摘要:

The invention relates to a process and apparatus for formation and deposition of thin films on a substrate, in a vacuum, by evaporation of the elements to form a Zn.sub.x Cd.sub.1-x S compound having a preselected fixed ratio of cadmium to zinc, characterized by the evaporation of cadmium and zinc at a rate the ratio of which is proportional to the stoichiometric ratio of those elements in the intended compound and evaporation of sulfur at a rate at least twice the combined rates of cadmium and zinc, and at least twice that required by the stoichiometry of the intended compound.

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1989
被引量:6

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