Process and apparatus for formation of photovoltaic compounds
申请(专利)号:
US19830543548
申请日期:
1983-10-19
公开/公告号:
US4526809A
公开/公告日期:
1985-07-02
申请(专利权)人:
UNIVERSITY OF DELAWARE
关键词:
process apparatus formation photovoltaic compounds relates process apparatus formation deposition
被引量:
摘要:
The invention relates to a process and apparatus for formation and deposition of thin films on a substrate, in a vacuum, by evaporation of the elements to form a Zn.sub.x Cd.sub.1-x S compound having a preselected fixed ratio of cadmium to zinc, characterized by the evaporation of cadmium and zinc at a rate the ratio of which is proportional to the stoichiometric ratio of those elements in the intended compound and evaporation of sulfur at a rate at least twice the combined rates of cadmium and zinc, and at least twice that required by the stoichiometry of the intended compound.
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