MICROCIRCUIT ART GENERATING MEANS

阅读量:

13

申请(专利)号:

USD3704946

申请日期:

1969-02-20

公开/公告号:

US3704946A

公开/公告日期:

1972-12-05

申请(专利权)人:

OPT OMECHANISMS INC.

被引量:

39

摘要:

A machine to generate the art work in making photomasks for microcircuits. A photoplate is mounted on a precision X and Y coordinate table underneath a microflash camera having a master reticle holder holding a master reticle plate. The master plate has a plurality of apertures of different sizes, shapes and configurations. Lines and designs are traced on the receiving plate by scanning it and flashing the camera lamp through the aperture.

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1984
被引量:8

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