Semiconductor device having an alignment mark formed by the same material with a metal post
申请(专利)号:
US20000577932
申请日期:
2000-05-25
公开/公告号:
US7112889B1
公开/公告日期:
2006-09-26
申请(专利权)人:
SHIGEYUKI MARUYAMA;YASUYUKI ITOH;TETSUROU HONDA;KAZUHIRO TASHIRO;MAKOTO HASEYAMA;KENICHI NAGASHIGE;YOSHIYUKI YONEDA;HIROHISA MATSUKI
国省代号:
JP
被引量:
摘要:
A semiconductor device has an alignment mark which can be recognized by a conventional wafer prober. A redistribution layer connects electrodes of the semiconductor device to electrode pads located in predetermined positions of the redistribution layer. Metal posts configured to be provided with external connection electrodes are formed on the electrode pads of the redistribution layer. A mark member made of the same material as the metal posts is formed on the redistribution layer. The mark member serves as an alignment mark located in a predetermined positional relationship with the metal posts.
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