Micromachined scanning confocal optical microscope
摘要：
We describe a miniature scanning confocal optical microscope constructed from components micromachined using silicon and fused silica. The design, fabrication, and characterization of the components of the microscope as well as the assembly of the system are described. Sample images acquired using the instrument are also presented
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关键词：
anisotropic etching grating lens miniature confocal microscope silicon micromachining torsional mirror
DOI：
10.1109/84.661382
被引量：
年份：
1996
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