摘要：

The high diffraction efficiency regime of binary gratings occurs at periodicities on the order of a wavelength in order to produce grating which diffract radiation with efficiencies of greater than 90%, a fabrication procedure is disclosed which uses halographic and very large scale integration techniques which allow fine control over the periodicity and depth parameters to produce binary planar optical elements having a ratio of &lgr;/T greater than one (where &lgr; equals the wavelength of an illuminating wavefront, and T equals the grating periodicity). Additionally, the disclosed process produces high optical quality diffractive elements with phase precision of as high as . lambda. /100. These diffractive elements include laser beam multiplexers, beam profile shapers, and binary lenses which are lossless optical transfer functions.

展开