Apparatus for forming a film and an electroluminescence device
摘要：
A device having three evaporation sources and a unit for moving the respective evaporation sources in one chamber is used, whereby it becomes possible to increase efficiency of use of an evaporation material. Consequently, manufacturing cost can be reduced, and a uniform thickness can be obtained over an entire surface of a substrate even in the case in which a large area substrate is used.
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DOI：
US8399362 B2
被引量：
年份：
2014
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2014
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