摘要：

Styrene-based plasma polymer (SPP) films having thickness in the range of 900–1800 nm are deposited from radiofrequency (RF) Ar/styrene glow discharge. Depositions of the SPP films are carried out at working pressure of 1.2 × 10 1 mbar and in the RF power range of 40–130 W. The physical and chemical properties of the SPP films are investigated as a function of RF power. Optical emission spectroscopy (OES) studies on Ar/styrene glow discharge reveal that the relative concentrations of active plasma species are strongly dependent on the variation of RF power. Fourier transform infrared (FT-IR) and X-ray photoelectron spectroscopy (XPS) are used to analyze the internal chemical structures of the films. It is revealed that the SPP film with highest carbon content exhibits enhanced scratch and corrosion resistance behavior along with stable thermal properties. The thermogravimetric (TGA) and gel permeation chromatography (GPC) results suggest the presence of both aliphatic and aromatic units in the SPP films. Attempts are made to correlate the results obtained from OES, FT-IR and XPS analyses with the deposited films properties. The possibility of using SPP films as protective coatings is also explored.

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