Laser system for functional trimming of films and devices

阅读量:

21

申请(专利)号:

US08/959140

申请日期:

19971028

公开/公告号:

US05808272A

公开/公告日期:

19980915

申请(专利权)人:

ELECTRO SCIENTIFIC INDUSTRIES INC.

发明人:

Y SunEJ Swenson

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被引量:

85

摘要:

A laser system (50) and processing method exploit a wavelength range (40) in which devices, including any semiconductor material-based devices (10) affected by conventional laser wavelengths and devices having light- sensitive or photo-electronic portions integrated into their circuits, can be effectively functionally trimmed without inducing performance drift or malfunctions in the processed devices. True measurement values of operational parameters of the devices can, therefore, be obtained without delay for device recovery, i.e., can be obtained substantially instantaneously with laser impingement. Accordingly, the present invention allows faster functional laser processing, eases geometric restrictions on circuit design, and facilitates production of denser and smaller devices.

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2006
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