Method and apparatus for laser scribing glass sheet substrate coatings
申请(专利)号:
US20010928203
申请日期:
2001-08-10
公开/公告号:
US2003029848A1
公开/公告日期:
2003-02-13
申请(专利权)人:
BORGESON FRANK A.;HANAK JOESPH J.;HARJU RICKY S.;HARJU KAREN M.;HELMAN NORMAN L.;HECHT KENNETH R.
被引量:
摘要:
A method and apparatus () for laser scribing coatings on glass sheet substrates by conveying the substrate adjacent a laser source () that provides a pulsed laser beam () with a wavelength at a near-infrared fundamental frequency and having a frequency in the range of 50 to 100 kilohertz and a pulse duration in the range of 8 to 70 nanoseconds, and by reflecting the beam by an XYZ galvanometer controlled mirror system () toward an uncoated surface of the substrate for passage therethrough to the coating on the other surface to provide overlapping ablations through the coating and scribing at a speed of at least 1000 millimeters per second.
展开
通过文献互助平台发起求助,成功后即可免费获取论文全文。
相似文献
参考文献
引证文献
引用走势
辅助模式
引用
文献可以批量引用啦~
欢迎点我试用!