摘要：

The present invention is directed to a phase locked driving circuit for a piezoelectric pump in a fluidic gas angular rate sensor in which the driving circuit comprises a voltage controlled oscillator for providing an oscillating drive signal to the piezoelectric pump. A phase difference detector is coupled to the output of the oscillator for detecting the phase of the current of the output signal and the phase of the voltage of the output signal and for providing an output indicative of the phase difference therebetween. An error amplifier is coupled to the phase difference detector for comparing the phase difference to a predetermined phase difference and for producing a voltage indicative thereof. The voltage of the error detecting circuit is applied to the control input of the voltage controlled oscillator for controlling the output thereof.

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