Micromachined magnetically balanced membrane actuator

阅读量:

14

申请(专利)号:

US20010964897

申请日期:

2001-09-28

公开/公告号:

US2002064292A1

公开/公告日期:

2002-05-30

申请(专利权)人:

ROMBACH PIRMIN;REHDER JORG

发明人:

P RombachJrg Rehder

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被引量:

31

摘要:

The present invention relates to an miniature actuator especially suitable for hearing aid applications. The actuator according to the present invention operates according to the change in reluctance principle. In particular, the actuator according to the present invention operates in a balanced configuration comprising two planar coils, two magnets, a membrane and a spacer chip providing the necessary back chamber volume.

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2008
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