摘要：

An etching composition and a method utilizing such a composition for etching a surface of a polyimide is disclosed. The method comprises exposing the polyimide surface to an etching composition comprising an aqueous solution of a basic compound and ethylene diamine. The ethylene diamine synergistically increases the etching rate of the polyimide. When the ethylene diamine is present in an amount in excess of its degree of solubility the etching of the polyimide results in a frosted or matte finish thereof.

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