摘要：

1. An alignment fixture for orienting geometric indicia on a mask with respect to a semi-conductor wafer comprising mask holding means, wafer holding means, reciprocable means urging said mask holding means and said wafer holding means toward each other so that the wafer and the mask abut, self-aligning means constituting a universal joint in conjunction with said reciprocable means orienting the complementary abutting surfaces into a plane interface in order to compensate for variance in wafer thickness, second reciprocable means for separating said mask and wafer holding means while at the same time spacing apart the opposed surfaces of the mask and the wafer in adjacent parallel planes, and micro-manipulator means coupled with said .wafer holding means and remotely positioned therefrom is for orienting the wafer along X- and Y-axes into precise registration with the mask indicia.

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