CHEMICAL SENSORS WITH PARTIALLY EXTENDED SENSOR SURFACES
摘要:
In one implementation, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A dielectric material defines an opening extending to the upper surface of the floating gate conductor. A conductive element on a sidewall of the opening and extending over an upper surface of the dielectric material.
展开
被引量:
年份:
2014
通过文献互助平台发起求助,成功后即可免费获取论文全文。
请先登入
相似文献
参考文献
引证文献
辅助模式
0
引用
文献可以批量引用啦~
欢迎点我试用!