CHEMICAL SENSORS WITH PARTIALLY EXTENDED SENSOR SURFACES

阅读量:

20

作者:

K FifeJ BustilloJ Owens

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摘要:

In one implementation, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A dielectric material defines an opening extending to the upper surface of the floating gate conductor. A conductive element on a sidewall of the opening and extending over an upper surface of the dielectric material.

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被引量:

1

年份:

2014

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